High-temperature electrical properties of polymer-derived ceramic SiBCN thin films fabricated by direct writing

Autor: Wu, Chao, Pan, Xiaochuan, Lin, Fan, Cui, Zaifu, Li, Xin, Chen, Guochun, Liu, Xianlong, He, Yingping, He, Gonghan, Hai, Zhenyin, Chen, Qinnan, Sun, Daoheng
Zdroj: In Ceramics International 1 June 2022 48(11):15293-15302
Databáze: ScienceDirect