Effects of oxygen sources on properties of atomic-layer-deposited ferroelectric hafnium zirconium oxide thin films
| Autor: | Cho, Ah-Jin, Jeon, Jihoon, Chung, Hong Keun, Baek, In-Hwan, Yang, Kun, Park, Min Hyuk, Baek, Seung-Hyub, Kim, Seong Keun |
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| Zdroj: | In Ceramics International 1 February 2022 48(3):3280-3286 |
| Databáze: | ScienceDirect |
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