Chemical-mechanical polishing performance of core-shell structured polystyrene@ceria/nanodiamond ternary abrasives on sapphire wafer
| Autor: | Zhou, Chen, Xu, Xiangyang, Dai, Lei, Gong, Haiming, Lin, Shuntian |
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| Zdroj: | In Ceramics International 15 November 2021 47(22):31691-31701 |
| Databáze: | ScienceDirect |
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