Role of oxygen in surface kinetics of SiO2 growth on single crystal SiC at elevated temperatures
| Autor: | Zhang, Yongjie, Liang, Shaoxiang, Zhang, Yi, Li, Rulin, Fang, Zhidong, Wang, Shuai, Deng, Hui |
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| Zdroj: | In Ceramics International 15 January 2021 47(2):1855-1864 |
| Databáze: | ScienceDirect |
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