Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing
| Autor: | Mobtakeri, Soheil, Akaltun, Yunus, Özer, Ali, Kılıç, Merhan, Tüzemen, Ebru Şenadım, Gür, Emre |
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| Zdroj: | In Ceramics International 15 January 2021 47(2):1721-1727 |
| Databáze: | ScienceDirect |
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