Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering
| Autor: | Liang, Hailong, Xu, Jin, Zhou, Dayu, Sun, Xu, Chu, Shichao, Bai, Yizhen |
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| Zdroj: | In Ceramics International 1 February 2016 42(2) Part A:2642-2647 |
| Databáze: | ScienceDirect |
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