Crafting at the nanoscale: A comprehensive review of mechanical Atomic force microscopy-based lithography methods and their evolution

Autor: Vincenti, Lorenzo, Pellegrino, Paolo, Cascione, Mariafrancesca, De Matteis, Valeria, Farella, Isabella, Quaranta, Fabio, Rinaldi, Rosaria
Zdroj: In Materials & Design July 2024 243
Databáze: ScienceDirect