Hierachical micro/nano structures fabrication by a novel tri-axial piezoelectric servo system
| Autor: | Yu, Haiqiang, Han, Jinguo, Li, Shiyu, Zhao, Dongpo, Wang, Jinhui, Tian, Yebing, Lin, Jieqiong |
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| Zdroj: | In Materials & Design December 2022 224 |
| Databáze: | ScienceDirect |
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