Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper
| Autor: | Dogan, Gül, Chiu, Frank, Chen, Sam U.H., David, Mebil R.T., Michalowski, Andreas, Schänzel, Michael, Silber, Christian, Schütz, Gisela, Grévent, Corinne, Keskinbora, Kahraman |
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| Zdroj: | In Materials & Design 15 November 2021 210 |
| Databáze: | ScienceDirect |
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