Molecular dynamics simulations of silicon-fluorine etching
| Autor: | Darcy, Adam, Galijatovic, Alema, Barth, Ronald, Kenny, Timothy, Krantzman, Kristin D., Schoolcraft, Tracy A. |
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| Zdroj: | In Journal of Molecular Graphics 1996 14(5):260-271 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect