Hydrogenation and hybridization in hard W-C:H coatings prepared by hybrid PVD-PECVD method with methane and acetylene
| Autor: | Lofaj, František, Kabátová, Margita, Dobrovodský, Jozef, Cempura, Grzegorz |
|---|---|
| Zdroj: | In International Journal of Refractory Metals and Hard Materials April 2020 88 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect