Metrological set-up for calibrating 2-dimensional grid plates with sub-micrometre precision
Autor: | Klobucar, Rok, McCarthy, Michael, Acko, Bojan |
---|---|
Zdroj: | In Measurement January 2019 132:60-67 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Klobucar, Rok, McCarthy, Michael, Acko, Bojan |
---|---|
Zdroj: | In Measurement January 2019 132:60-67 |
Databáze: | ScienceDirect |
Externí odkaz: |