Impact of different stochastic line edge roughness patterns on measurements in scatterometry - A simulation study

Autor:	Gross, H., Heidenreich, S., Bär, M.
Zdroj:	In Measurement February 2017 98:339-346
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect