Design of a sample approach mechanism for a metrological atomic force microscope

Autor: Piot, J., Qian, J., Pirée, H., Kotte, G., Pétry, J., Kruth, J.-P., Vanherck, P., Van Haesendonck, C., Reynaerts, D.
Zdroj: In Measurement January 2013 46(1):739-746
Databáze: ScienceDirect