An alternative method for measuring small displacements with differential phase difference of dual-prism and heterodyne interferometry
| Autor: | Chen, Kun-Huang, Chiu, Huang-Sen, Chen, Jing-Heng, Chen, You-Cheng |
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| Zdroj: | In Measurement July 2012 45(6):1510-1514 |
| Databáze: | ScienceDirect |
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