Deposition of aluminium nitride coatings using a cold wall CVD reactor
| Autor: | Armas, B., de Icaza Herrera, M. *, Sibieude, F. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2000 123(2):199-203 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Armas, B., de Icaza Herrera, M. *, Sibieude, F. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2000 123(2):199-203 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect