Deposition of hard crystalline Al2O3 coatings by pulsed d.c. PACVD
| Autor: | Täschner, Ch *, Ljungberg, B, Endler, I, Leonhardt, A |
|---|---|
| Zdroj: | In Surface & Coatings Technology September 1999 116-119:891-897 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Täschner, Ch *, Ljungberg, B, Endler, I, Leonhardt, A |
|---|---|
| Zdroj: | In Surface & Coatings Technology September 1999 116-119:891-897 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect