In situ scanning tunneling microscopy studies of the evolution of surface morphology and microstructure in epitaxial TiN(001) grown by ultra-high-vacuum reactive magnetron sputtering

Autor: Karr, Brian W., Petrov, I., Desjardins, P., Cahill, David G., Greene, J.E.
Zdroj: In Surface & Coatings Technology 1997 94:403-408
Databáze: ScienceDirect