Amorphous hydrogenated fluorinated carbon films produced by PECVD
| Autor: | Durrant, Steven F., Rangel, Elidiane C., da Cruz, Nilson C., Castro, Sandra G.C., Bica de Moraes, Mário A. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1996 86 Part 1:443-448 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect