Co-deposition of TaC and SiC by chemical vapor deposition: A systematical thermodynamic exploration
| Autor: | Huang, Wei, Wang, Junjun, Lu, Pengjian, Xu, Qingfang, Zhang, Chitengfei, Peng, Jian, Wang, Chuanbin, Tu, Rong, Zhang, Song |
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| Zdroj: | In Surface & Coatings Technology 15 September 2024 491 |
| Databáze: | ScienceDirect |
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