Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia
| Autor: | Ermakova, Evgeniya, Shayapov, Vladimir, Saraev, Andrey, Maximovsky, Eugene, Kirienko, Viktor, Khomyakov, Maksim, Sulyaeva, Veronica, Kolodin, Aleksey, Gerasimov, Evgeny, Kosinova, Marina |
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| Zdroj: | In Surface & Coatings Technology 30 August 2024 490 |
| Databáze: | ScienceDirect |
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