Synthesis and growth mechanism of silicon-based nanostructures from polysiloxane via CVD process

Autor: Sokolowski, Krystian, Blazewicz, Stanislaw, Marzec, Mateusz M., Bernasik, Andrzej, Fraczek-Szczypta, Aneta
Zdroj: In Surface & Coatings Technology 30 May 2024 484
Databáze: ScienceDirect