Effect of substrate bias on the formation of nanotwin and properties in Cu thin films for advanced packaging technology
| Autor: | Chang, Leh-Ping, Chang, Sun-Yi, Ouyang, Fan-Yi |
|---|---|
| Zdroj: | In Surface & Coatings Technology 30 April 2024 482 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect