Copper target erosion during unbalanced magnetron sputtering under different electromagnetic fields
| Autor: | An, Qiaoru, Li, Jie, Fang, Haisheng |
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| Zdroj: | In Surface & Coatings Technology 15 February 2024 477 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | An, Qiaoru, Li, Jie, Fang, Haisheng |
|---|---|
| Zdroj: | In Surface & Coatings Technology 15 February 2024 477 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect