Effect of deposition temperature and hydrogen as a process gas on mechanical properties and specific electrical resistivity of thick a-C:H obtained by means of PACVD
| Autor: | Danninger, Simon, Delfin, Francisco A., Schachinger, Manuel, Forsich, Christian, Heim, Daniel, Rübig, Bernd, Dipolt, Christian, Müller, Thomas |
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| Zdroj: | In Surface & Coatings Technology 15 December 2023 474 |
| Databáze: | ScienceDirect |
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