Tuning the characteristics of Al2O3 thin films using different pulse configurations: Mid-frequency, high-power impulse magnetron sputtering, and their combination
| Autor: | Ferreira, Marta P., Martínez-Martínez, D., Chemin, J.-B., Choquet, P. |
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| Zdroj: | In Surface & Coatings Technology 15 August 2023 466 |
| Databáze: | ScienceDirect |
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