Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Comparison of PECVD and FCVA deposition technique
| Autor: | Hirata, Yuki, Kawai, Kotaro, Kato, Toyohiro, Fujimoto, Hayata, Tameno, Yuto, Ishikawa, Takumi, Matsuoka, Hiroshige, Akasaka, Hiroki, Ohtake, Naoto |
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| Zdroj: | In Surface & Coatings Technology 15 May 2023 460 |
| Databáze: | ScienceDirect |
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