Evolution of microstructure and properties of TiNbCrAlHfN films grown by unipolar and bipolar high-power impulse magnetron co-sputtering: The role of growth temperature and ion bombardment
| Autor: | Du, Hao, Shu, Rui, Boyd, Robert, le Febvrier, Arnaud, Helmersson, Ulf, Eklund, Per, Lundin, Daniel |
|---|---|
| Zdroj: | In Surface & Coatings Technology 25 April 2023 459 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect