Effect of low-pressure deposition on the mechanical and tribological properties of a-C:H films deposited via modified pulsed-DC PECVD with active screen as an additional cathode
| Autor: | Capote, A., Capote, G., Corat, E.J., Trava-Airoldi, V.J. |
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| Zdroj: | In Surface & Coatings Technology 15 September 2022 445 |
| Databáze: | ScienceDirect |
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