Non-reactive HiPIMS deposition of NbCx thin films: Effect of the target power density on structure-mechanical properties
| Autor: | Bahr, A., Glechner, T., Wojcik, T., Kirnbauer, A., Sauer, M., Foelske, A., Hunold, O., Ramm, J., Kolozsvári, S., Ntemou, E., Pitthan, E., Primetzhofer, D., Riedl, H., Hahn, R. |
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| Zdroj: | In Surface & Coatings Technology 25 August 2022 444 |
| Databáze: | ScienceDirect |
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