Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition
| Autor: | Aarik, Lauri, Mändar, Hugo, Tarre, Aivar, Piirsoo, Helle-Mai, Aarik, Jaan |
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| Zdroj: | In Surface & Coatings Technology 25 May 2022 438 |
| Databáze: | ScienceDirect |
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