Epitaxial growth of TiN on (0001) semi-insulating 4H-SiC substrate by reactive sputtering
| Autor: | Chen, Hsueh-I, Chiu, Kun-An, Lin, Jing-Feng, Lin, Kuan-Yu, Chen, Wei-Chia, Wu, Ping-Hsun, Ko, Cheng-Jung, Chang, Li, Chen, Chun-Hua |
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| Zdroj: | In Surface & Coatings Technology 15 May 2022 437 |
| Databáze: | ScienceDirect |
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