Ionization region model of high power impulse magnetron sputtering of copper
| Autor: | Gudmundsson, J.T., Fischer, J., Hinriksson, B.P., Rudolph, M., Lundin, D. |
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| Zdroj: | In Surface & Coatings Technology 25 July 2022 442 |
| Databáze: | ScienceDirect |
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