Towards energy-efficient physical vapor deposition: Mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating
| Autor: | Li, X., Bakhit, B., Johansson Jõesaar, M.P., Petrov, I., Hultman, L., Greczynski, G. |
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| Zdroj: | In Surface & Coatings Technology 25 October 2021 424 |
| Databáze: | ScienceDirect |
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