Application and limitations of inverted fireballs in a magnetron sputter device

Autor:	Gruenwald, J., Balzer, M., Eichenhofer, G., Fenker, M.
Zdroj:	In Surface & Coatings Technology 25 September 2021 422
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect