Effect of reflected Ar neutrals on tantalum diboride coatings prepared by direct current magnetron sputtering
| Autor: | Viskupová, K., Grančič, B., Roch, T., Satrapinskyy, L., Truchlý, M., Mikula, M., Šroba, V., Ďurina, P., Kúš, P. |
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| Zdroj: | In Surface & Coatings Technology 15 September 2021 421 |
| Databáze: | ScienceDirect |
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