Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering
| Autor: | Zenkin, S., Gaydaychuk, A., Linnik, S. |
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| Zdroj: | In Surface & Coatings Technology 25 April 2021 412 |
| Databáze: | ScienceDirect |
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