Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures
| Autor: | Topka, Konstantina Christina, Diallo, Babacar, Samelor, Diane, Laloo, Raphael, Sadowski, Daniel, Genevois, Cecile, Sauvage, Thierry, Senocq, Francois, Vergnes, Hugues, Turq, Viviane, Pellerin, Nadia, Caussat, Brigitte, Vahlas, Constantin |
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| Zdroj: | In Surface & Coatings Technology 15 February 2021 407 |
| Databáze: | ScienceDirect |
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