Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film
| Autor: | Xia, Yuanlin, Hirai, Yoshikazu, Tsuchiya, Toshiyuki |
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| Zdroj: | In Surface & Coatings Technology 15 January 2021 405 |
| Databáze: | ScienceDirect |
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