Correlation between fracture characteristics and valence electron concentration of sputtered Hf-C-N based thin films
Autor: | Glechner, T., Lang, S., Hahn, R., Alfreider, M., Moraes, V., Primetzhofer, D., Ramm, J., Kolozsvári, S., Kiener, D., Riedl, H. |
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Zdroj: | In Surface & Coatings Technology 15 October 2020 399 |
Databáze: | ScienceDirect |
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