Synthesis of aluminum nitride coatings assisted by fast argon atoms in a magnetron sputtering system with a separate input of argon and nitrogen
| Autor: | Metel, A., Grigoriev, S., Volosova, M., Melnik, Yu., Mustafaev, E. |
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| Zdroj: | In Surface & Coatings Technology 25 September 2020 398 |
| Databáze: | ScienceDirect |
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