Investigations of chemical and atomic composition of native oxide layers covering SI GaAs implanted with Xe ions

Autor: Tuan, P.L., Kulik, M., Nowicka-Scheibe, J., Żuk, J., Horodek, P., Khiem, L.H., Phuc, T.V., Anh, Nguyen Ngoc, Turek, M.
Zdroj: In Surface & Coatings Technology 25 July 2020 394
Databáze: ScienceDirect