Investigations of chemical and atomic composition of native oxide layers covering SI GaAs implanted with Xe ions
Autor: | Tuan, P.L., Kulik, M., Nowicka-Scheibe, J., Żuk, J., Horodek, P., Khiem, L.H., Phuc, T.V., Anh, Nguyen Ngoc, Turek, M. |
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Zdroj: | In Surface & Coatings Technology 25 July 2020 394 |
Databáze: | ScienceDirect |
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