Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition
| Autor: | Zegtouf, Hind, Saoula, Nadia, Azibi, Mourad, Bait, Larbi, Madaoui, Noureddine, Khelladi, Mohamed Redha, Kechouane, Mohamed |
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| Zdroj: | In Surface & Coatings Technology 15 July 2020 393 |
| Databáze: | ScienceDirect |
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