Tunable composition and properties of Al-O-N films prepared by reactive deep oscillation magnetron sputtering
| Autor: | Belosludtsev, A., Vlček, J., Houška, J., Haviar, S., Čerstvý, R. |
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| Zdroj: | In Surface & Coatings Technology 25 June 2020 392 |
| Databáze: | ScienceDirect |
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