Characteristics of Ag thin films sputter deposited using Ar or Kr gas under different pressure
| Autor: | Sagara, Ryosuke, Kawamura, Midori, Kiba, Takayuki, Abe, Yoshio, Kim, Kyung Ho |
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| Zdroj: | In Surface & Coatings Technology 25 April 2020 388 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect