Interaction of gas cluster ions with solids: Experiment and computer simulations

Autor: Chernysh, V.S., Ieshkin, A.E., Kireev, D.S., Nazarov, A.V., Zavilgelsky, A.D.
Zdroj: In Surface & Coatings Technology 25 April 2020 388
Databáze: ScienceDirect