Deposition of diamond-like carbon films on insulating substrates by plasma source ion implantation

Autor:	Hatada, R., Flege, S., Ensinger, W., Baba, K.
Zdroj:	In Surface & Coatings Technology 15 March 2020 385
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect