Formation of Ag nanoparticles in Si (100) wafers by single and multiple low energy Ag ions implantation

Autor: Modrić-Šahbazović, A., Novaković, M., Popović, M., Schmidt, E., Gazdić, I., Bibić, N., Ronning, C., Rakočević, Z.
Zdroj: In Surface & Coatings Technology 15 November 2019 377
Databáze: ScienceDirect