Formation of Ag nanoparticles in Si (100) wafers by single and multiple low energy Ag ions implantation
Autor: | Modrić-Šahbazović, A., Novaković, M., Popović, M., Schmidt, E., Gazdić, I., Bibić, N., Ronning, C., Rakočević, Z. |
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Zdroj: | In Surface & Coatings Technology 15 November 2019 377 |
Databáze: | ScienceDirect |
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