Hybrid PVD-PECVD W-C:H coatings prepared by different sputtering techniques: The comparison of deposition processes, composition and properties
| Autor: | Lofaj, František, Kabátová, Margita, Kvetková, Lenka, Dobrovodský, Jozef, Girman, Vladimír |
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| Zdroj: | In Surface & Coatings Technology 15 October 2019 375:839-853 |
| Databáze: | ScienceDirect |
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