Characterization of surface modification mechanisms for boron nitride films under plasma exposure
| Autor: | Higuchi, Tomoya, Noma, Masao, Yamashita, Michiru, Urabe, Keiichiro, Hasegawa, Shigehiko, Eriguchi, Koji |
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| Zdroj: | In Surface & Coatings Technology 15 November 2019 377 |
| Databáze: | ScienceDirect |
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